GWSPS Oil free Scroll Vacuum Pump
GEOWELL is a professional manufacturer of scroll vacuum pumps with over 20 years of field experience, the longest performance hours and the largest sales in China, GEOWELL's GWSPS series scroll vacuum pumps are the premium choice for clean pumping technology.
|
Model |
GWSPS75 |
GWSPS150 |
GWSPS300 |
GWSPS500 |
GWSPS900 |
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|
Pumping Speed |
50Hz |
l/s |
1.0 |
2.6 |
4.4 |
6.7 |
11.6 |
|
l/min |
60.0 |
156.0 |
264.0 |
402.0 |
693.0 |
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|
m3/h |
3.6 |
9.4 |
15.8 |
24.0 |
41.6 |
||
|
cfm |
2.2 |
5.7 |
8.8 |
14.7 |
24.6 |
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|
60Hz |
l/s |
1.2 |
3.1 |
5.3 |
8.1 |
13.9 |
|
|
l/min |
72.0 |
187.0 |
317.0 |
482.0 |
831.6 |
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|
m3/h |
4.2 |
11.1 |
18.9 |
28.8 |
50.0 |
||
|
cfm |
2.4 |
6.8 |
10.6 |
17.6 |
30.0 |
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|
Ultimate Pressure |
Pa |
≤15 |
≤10 |
≤8 |
≤5 |
≤200 |
|
|
mbar |
≤1.5*10-1 |
≤1.0*10-1 |
≤8.0*10-2 |
≤5.0*10-2 |
≤2.0 |
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|
Torr |
≤1.1*10-1 |
≤7.5*10-2 |
≤6.0*10-2 |
≤3.7*10-2 |
≤1.5 |
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|
psi |
≤2.2*10-3 |
≤1.5*10-3 |
≤1.2*10-3 |
≤7.5*10-4 |
≤2.9*10-2 |
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|
Noise Level |
dB(A) |
≤61 |
|||||
|
Leakage |
Pa·l/s |
1*10-7 |
|||||
|
Max. Inlet/Exhaust Pressure |
MPa |
0.1 / 0.13 |
|||||
|
Ambient Operation Temp. |
℉ |
41～104 |
|||||
|
Cooling Type |
|
Air cooled |
|||||
|
Inlet/Exhaust Flange |
|
KF25/KF16 |
KF40/KF16 |
||||
|
Motor 1 phase |
Power |
kW |
0.55 |
0.55 |
0.55 |
--- |
--- |
|
Voltage |
V |
110～115 (60Hz)，200～230 (50Hz） |
--- |
--- |
|||
|
Speed |
rpm |
1425 (50Hz)，1725 (60Hz) |
--- |
--- |
|||
|
Plug |
|
North America, Europe, UK/Ireland, India |
--- |
--- |
|||
|
Motor 3 phase |
Power |
kW |
0.55 |
0.55 |
0.55 |
0.75 |
1.5 |
|
Voltage |
V |
200～230 or 380～415 (50Hz)， 200～230 or 460 (60Hz) |
|||||
|
Speed |
rpm |
1425 (50Hz)，1725 (60Hz) |
|||||
|
Dimensions |
1 phase |
mm |
505*265*275 |
510*265*275 |
535*320*305 |
--- |
--- |
|
3 phase |
mm |
505*265*275 |
510*265*275 |
535*320*305 |
590*320*345 |
590*320*345 |
|
|
Net Weight |
1 phase |
kg |
21 |
22 |
32 |
--- |
--- |
|
3 phase |
kg |
20 |
21 |
27 |
38 |
41 |
|
Safety Precautions
Be sure the inlet gas temperature must be less than 122℉.
GWSPS oil free scroll vacuum pump is constructed with pump head assembly, crank pin assembly, bracket assembly, air flush assembly, and exhaust valve assembly. Two spiral cylinders, one offset and orbiting against the other fixed with an offset of 180° to form several crescent-shaped pockets of differing sizes. By means of an eccentric drive, the orbiting scroll is made to orbit about the fixed scroll, reducing the volume of the pockets and compressing gas from outside towards the inside thereby pumping the gas from vacuum chamber.
Features and Benefits
100% no oil clean vacuum
No oil back-diffusion, no oil mist exhaust, provide clean vacuum environment
Wide product lineup
Pumping speed covers3~60m3/h, limited vacuum level 1~8 Pa
Suitable for all type of power supply around the world
110/220/380/460v, 50/60Hz for choose
Low vibration, low noise
57~63 dB(A), smooth operation
High efficiency, ease of maintenance
No water cooled, no oil lubricated, no daily maintenance
Applications
Semiconductor industry
Vacuum sputtering machine.
IC plasma cleaning machine.
IC plasma polishing machine.
IC packaging machine.
IC transmission chamber.
Photoelectric industry
LED vacuum annealing furnace.
Load lock/transfer chambers.
Glove box.
LED packaging machine.
Liquid crystal injection and packaging.
Material industry
Vacuum annealing furnace.
Vacuum diffusion oven.
3D metal printing.
Single crystal growth furnace.
Microwave cleaning and microwave drying machine.
E-beam/Laser melting.
Vacuum degassing. Vacuum gas substitution.
Food and drug industry
Freezing dry. Vacuum storage.
Medical equipment
Low temperature plasma sterilizer.
Vacuum storage.
Dental equipment.
Energy industry
SF 6 Gas recovery machine.
Lithium battery drying and packaging machine.
Analyzing instrument and device
Spectroscopy/scanning electron microscopy
Space environment simulation machine
Helium Leak detector
Mass spectrometer
Cryopump regeneration
Accelerators / synchrotrons
Vacuum equipment
Oil free ultrahigh vacuum unit
Oil free vacuum unit
|
|
A |
B |
C |
D |
E |
F |
G |
H |
K |
L |
M |
N |
d1 |
d2 |
|
GWSPS75 |
505 |
265 |
275 |
225 |
215 |
120 |
125 |
160 |
80 |
65 |
200 |
250 |
KF25 |
KF16 |
|
GWSPS150 |
510 |
265 |
275 |
225 |
215 |
120 |
135 |
145 |
80 |
70 |
155 |
250 |
KF25 |
KF16 |
|
GWSPS300 |
535 |
320 |
305 |
255 |
230 |
160 |
140 |
165 |
95 |
85 |
200 |
270 |
KF25 |
KF16 |
|
GWSPS500 |
590 |
320 |
345 |
300 |
250 |
165 |
125 |
190 |
135 |
85 |
205 |
290 |
KF40 |
KF16 |
|
GWSPS900 |
590 |
320 |
345 |
300 |
250 |
165 |
125 |
190 |
135 |
85 |
205 |
290 |
KF40 |
KF16 |
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Add: No. 99A-18, Chuangxin 1st Road, Hunnan District, Shenyang, China 110169
Tel：+86-24-83685362
Mob：+86-13644904879
Fax：+86-24-23783066
Email： export@geowell.com.cn
