TEL: +86-24-83685362

GWMS Oil free Ultrhigh Vacuum System

Technical Specifications

Model

GWMS100/150

GWMS600/300

GWMS1200/600

GWMS1600/1000

Main Pump

FF-100

JTFB-600

JTFB-1200

JTFB-1600

Backing Pump

GWSP150

GWSP300

GWSP600

GWSP1000

Pumping Speed

cfm

2.2X102

1.1X104

1.7X104

3.4X104

m3/h

3.9X102

1.8X103

4.3X104

5.8X104

Ultimate Pressure

mbar

≦6.0X10-9

≦6.0X10-9

≦6.0X10-9

≦6.0X10-9

Torr

≦4.5X10-9

≦4.5X10-9

≦4.5X10-9

≦4.5X10-9

Start Time

min

<3

Noise

dB(A)

≦63

≦63

≦63

≦63

Max. Inlet/Exhaust Pressure

MPa

0.1/0.13

Ambient Operation Temp.

41~104

Cooling Type

 

Air cooled

Inlet/Exhaust Flange

 

CF100/KF16

CF150/KF16

CF200/KF16

CF250/KF16X2

Power

 

3 phase/ 1 phase, 380/220V, 50/60Hz

Dimensions

mm

500X510X680

730X570X700

950X570X730

990X630X880

 

 

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110004, China
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